Calculation of current distribution in tungsten plate under exposure to a pulsed electron beam
نویسندگان
چکیده
منابع مشابه
Pulsed Electron-Beam Heating
A pulsed, 20 kv electron beam is focussed upon a vapor-deposited thermocouple, and the resulting temperature vs. time response is studied. The experimental data show much scatter, but are consistent with the theoretical prediction that the characteristic thermal response time T is proportional to d , where d is the beam diameter at the thermocouple. From these data, for the soft-glass substrate...
متن کاملCharacterisation of electron-beam deposited tungsten interconnects
Electron beam deposition of tungsten from W(CO)6 has been studied for a range of different height deposits. The resistance of the deposited tracks was found to decrease with increasing height implying that thicker deposits have a higher metallic cross section. It was also found that when the current limits were increased to values in excess of 100 μA, the resistance decreased with successive vo...
متن کاملFast simulation of stochastic exposure distribution in electron-beam lithography
The relative critical dimension variation of nanoscale features has become large enough to significantly affect the minimum feature size and maximum circuit density realizable in most lithographic processes. One source of such variation is the line edge roughness (LER). In the electron-beam lithographic process, the fluctuation of exposure (energy deposited) in the resist is one of the main fac...
متن کاملDiffusion during electron-beam-induced reduction of tungsten trioxide
We report experimental results on the kinetics of the electron-beam-induced reduction of WO, by in situ high-resolution electron microscopy. Electron-beam irradiation of WO, results in complete reduction to W. The process is surfaceinitiated through desorption of oxygen from the crystal surface, and the subsequent growth of tungsten was found to be a diffusion-controlled process. The damage rat...
متن کاملfrom linguistics to literature: a linguistic approach to the study of linguistic deviations in the turkish divan of shahriar
chapter i provides an overview of structural linguistics and touches upon the saussurean dichotomies with the final goal of exploring their relevance to the stylistic studies of literature. to provide evidence for the singificance of the study, chapter ii deals with the controversial issue of linguistics and literature, and presents opposing views which, at the same time, have been central to t...
15 صفحه اولذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2019
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/1392/1/012043